Vacuum Load Lock Door

Doors are hinged and fitted with a swingaway hand knob locking mechanism.

Vacuum load lock door.

All access doors are supplied with viton elastomer seals suitable for high vacuum service. Bolt kits for quick access doors with clearance holes. Quick access doors provide convenient and fast manual loading of samples in and out of vacuum chambers. Precision hinged access doors seal with a fluorocarbon o ring.

Mdc vacuum products llc is an iso 9001 2015 certified company. They are designed for base pressures between 1x10 7 mbar and 1x10 9 mbar. Doors are hinged and fitted with a swingaway hand knob locking mechanism. Home motion manipulation manipulation load lock systems bolt kits for quick access doors with clearance holes.

For load lock and process chamber isolation in semiconductor production systems for 200 and 300 mm wafers. The chambers are equipped with uhv connecting flanges and additional ports for future versatility. Fast entry access load lock doors hardware replacement parts contact us to contact someone directly please click here or call 1 412 387 9200 to get in contact with your dedicated sales team. The top port of the load lock chamber mechanism is usually sealed by a viton gasket.

Enable quick and convenient access into vacuum vessels such as process chambers and load locks. 30ºc maximum when attached. A range of options exist for e g. Viewport fitted doors are constructed with corning type 7056 glass fused to a kovar nickel iron transition sleeve.

For complete instructions and parts needed to fix your door locks and other related vacuum problems go here. See quick access doors section vacuum range. Ln 2 cooling or heating samples up to 600 c. Offered in a wide range of uhv flange sizes with or without viewport glass.

Load lock chambers are provided with a six inch cf flange for mounting to the gate valve a six inch add a door with 7056 glass viewport a 2 75 inch cf flange for attachment of the linear feedthrough and two 2 75 inch cf flanges for pumping. 022 transfer valve monovat direct for load lock and process chamber isolation in semiconductor production systems for 200 300 and 450 mm wafers. 1x10 10 torr temperature range 20ºc to 150ºc magnets must be removed for 150ºc rating.